Tantalum Rotatable Sputtering Targets

Tantalum Rotatable Sputtering Targetsroducts Specifications:

Product Name: tantalum tube, tantalum capillary tube

Execution standard: B521-98 ASTM

Brand: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)

Specifications: diameter 1.0-150mm

Thickness 0.2-5.0MM

Length 200mm-6000mm

chemical composition

牌号	mian composition		others  max%
	Ta	Nb	Fe	Si	Ni	W	Mo	Ti	Nb	O	C	H	N
Ta1	remind	——	0.005	0.005	0.002	0.01	0.01	0.002	0.04	0.02	0.01	0.0015	0.01
Ta2	remind	——	0.03	0.02	0.005	0.04	0.03	0.005	0.1	0.03	0.01	0.0015	0.01
TaNb3	remind	＜3.5	0.03	0.03	0.005	0.04	0.03	0.005	——	0.03	0.01	0.0015	0.01
TaNb20	remind	17.0～23.0	0.03	0.03	0.005	0.04	0.03	0.005	——	0.03	0.01	0.0015	0.01
Ta2.5W	remind		0.005	0.005	0.002	3.0	0.01	0.002	0.04	0.02	0.01	0.0015	0.01
Ta10W	remind		0.005	0.005	0.002	11	0.01	0.002	0.04	0.02	0.01	0.0015	0.01

If users have special requirements, the two sides agreed

Table 1. Outside diameter and wall thickness tolerance

OD,inch(mm)	OD Tolerance, inch(mm), +/-	wall thickness tolerance, %, +/-
<1 (25.4)	0.004 (0.102)	10
1~1.5 (25.4~38.1)	0.005 (0.127)	10
1.5~2 (38.1~50.8)	0.006 (0.152)	10
2~2.5 (50.8~63.5)	0.007 (0.178)	10
2.5~3.5 (63.5~88.9)	0.008 (0.254)	10

Table two. Mechanical properties (annealed)

Grade	Ultimate tensile strength, Pounds per inch (MPa) 2	Minimum yield strength, Pounds per inch 2 (MPa)	Elongation, min,% 1 inch (25.4 mm) mark
RO5200/RO5400	30000 (207)	20000 (138)	25
RO5252	40000 (276)	28000 (193)	20
RO5255	70000 (481)	60000 (414)	15
RO5240	40000 (276)	28000 (193)	20