Tantalum Rotatable Sputtering Targetsroducts Specifications:
Product Name: tantalum tube, tantalum capillary tube
Execution standard: B521-98 ASTM
Brand: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)
Specifications: diameter 1.0-150mm
Thickness 0.2-5.0MM
Length 200mm-6000mm
chemical composition
牌号
|
mian composition
|
others max%
| |||||||||||
Ta
|
Nb
|
Fe
|
Si
|
Ni
|
W
|
Mo
|
Ti
|
Nb
|
O
|
C
|
H
|
N
| |
Ta1
|
remind
|
——
|
0.005
|
0.005
|
0.002
|
0.01
|
0.01
|
0.002
|
0.04
|
0.02
|
0.01
|
0.0015
|
0.01
|
Ta2
|
remind
|
——
|
0.03
|
0.02
|
0.005
|
0.04
|
0.03
|
0.005
|
0.1
|
0.03
|
0.01
|
0.0015
|
0.01
|
TaNb3
|
remind
|
<3.5
|
0.03
|
0.03
|
0.005
|
0.04
|
0.03
|
0.005
|
——
|
0.03
|
0.01
|
0.0015
|
0.01
|
TaNb20
|
remind
|
17.0~23.0
|
0.03
|
0.03
|
0.005
|
0.04
|
0.03
|
0.005
|
——
|
0.03
|
0.01
|
0.0015
|
0.01
|
Ta2.5W
|
remind
|
0.005
|
0.005
|
0.002
|
3.0
|
0.01
|
0.002
|
0.04
|
0.02
|
0.01
|
0.0015
|
0.01
| |
Ta10W
|
remind
|
0.005
|
0.005
|
0.002
|
11
|
0.01
|
0.002
|
0.04
|
0.02
|
0.01
|
0.0015
|
0.01
|
If users have special requirements, the two sides agreed
Table 1. Outside diameter and wall thickness tolerance
OD,inch(mm)
|
OD Tolerance, inch(mm), +/-
|
wall thickness tolerance, %, +/-
|
<1 (25.4)
|
0.004 (0.102)
|
10
|
1~1.5 (25.4~38.1)
|
0.005 (0.127)
|
10
|
1.5~2 (38.1~50.8)
|
0.006 (0.152)
|
10
|
2~2.5 (50.8~63.5)
|
0.007 (0.178)
|
10
|
2.5~3.5 (63.5~88.9)
|
0.008 (0.254)
|
10
|
Table two. Mechanical properties (annealed)
Grade
|
Ultimate tensile strength,
Pounds per inch (MPa) 2
|
Minimum yield strength,
Pounds per inch 2 (MPa)
|
Elongation, min,%
1 inch (25.4 mm) mark
|
RO5200/RO5400
|
30000 (207)
|
20000 (138)
|
25
|
RO5252
|
40000 (276)
|
28000 (193)
|
20
|
RO5255
|
70000 (481)
|
60000 (414)
|
15
|
RO5240
|
40000 (276)
|
28000 (193)
|
20
|